Title :
An integrated micro-optical system for laser-to-fiber active alignment
Author :
Ishikawa, K. ; Jianglong Zhang ; Tuantranont, A. ; Bright, V.M. ; Yung-Cheng Lee
Author_Institution :
NSF Center for Adv. Manuf. & Packaging of Microwave, Opt. & Digital Electron., Colorado Univ., Boulder, CO, USA
Abstract :
We report a new micro-optical system for laser-to-fiber active alignment. An integrated microsystem platform, which has a thermally-actuated micromirror, a silicon etched v-groove and flip-chip bonding pads, is successfully fabricated and actuated for beam adjustment from a vertical-cavity surface-emitting laser (VCSEL) to a fiber. The micromirror has 4.0 degree maximum beam steering angle with the resolution of 0.08 degree/mA. With the steering angle reaching 2.5 degrees, the coupling efficiency improves to 80 % from 9% initial efficiency.
Keywords :
beam steering; laser mirrors; micro-optics; optical communication equipment; optical fibre couplers; optical fibre networks; surface emitting lasers; 80 percent; beam adjustment; beam steering angle; coupling efficiency; etched v-groove; flip-chip bonding pads; integrated micro-optical system; laser-to-fiber active alignment; laser-to-fiber couplings; optical communications; optical fiber networks; resolution; thermally-actuated micromirror; vertical-cavity surface-emitting laser; Etching; Fiber lasers; Laser beams; Micromechanical devices; Micromirrors; Optical coupling; Optical fibers; Packaging; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984316
