Title :
A SCS CMOS micromirror for optical coherence tomographic imaging
Author :
Huikai Xie ; Yingtian Pan ; Fedder, G.K.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
Reports a single-crystalline silicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is 50 cm. The mirror rotates 17/spl deg/ when a 15 mA current is applied. Cross-sectional images of 500 /spl times/ 1000 pixels covering an area of 2.9 mm by 2.8 mm are acquired at 5 frames/s by using an OCT system based on this micromirror.
Keywords :
biomedical imaging; elemental semiconductors; light coherence; micro-optics; microactuators; micromachining; mirrors; optical tomography; silicon; sputter etching; 1000 pixel; 15 mA; 500 pixel; 500000 pixel; OCT system; SCS CMOS micromirror; Si; bimorph actuation structures; cross-sectional images; deep reactive-ion-etch process; endoscopic optical coherence tomography; integrated polysilicon heater; laser beam scanning; micromachining process; mirror surface; movable bulk structures; optical coherence tomographic imaging; radius of curvature; single-crystalline silicon design; Aluminum; Biomedical imaging; Biomedical optical imaging; Micromirrors; Mirrors; Optical imaging; Optical interferometry; Silicon; Temperature; Tomography;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984317
