Title :
Fabrication and optical properties of aligned silicon nanowire arrays realized with thin silver film
Author :
Hung, Yung-Jr ; Wu, Kai-Chung ; Lee, San-Liang ; Pan, Yen-Ting
Author_Institution :
Dept. of Electron. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan
Abstract :
Silicon nanowire arrays realized by depositing thin silver film before etching are demonstrated to have good material and optical properties. They can provide <;0.4% antireflection over >;1400-nm wavelength range for large-area silicon samples.
Keywords :
antireflection coatings; elemental semiconductors; etching; nanofabrication; nanowires; silicon; Ag; Si; aligned silicon nanowire arrays; antireflection; etching; large area silicon samples; optical properties; thin silver film; Etching; Fabrication; Optical reflection; Optical surface waves; Silicon; Silver;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
