• DocumentCode
    2254504
  • Title

    Fabrication and optical properties of aligned silicon nanowire arrays realized with thin silver film

  • Author

    Hung, Yung-Jr ; Wu, Kai-Chung ; Lee, San-Liang ; Pan, Yen-Ting

  • Author_Institution
    Dept. of Electron. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Silicon nanowire arrays realized by depositing thin silver film before etching are demonstrated to have good material and optical properties. They can provide <;0.4% antireflection over >;1400-nm wavelength range for large-area silicon samples.
  • Keywords
    antireflection coatings; elemental semiconductors; etching; nanofabrication; nanowires; silicon; Ag; Si; aligned silicon nanowire arrays; antireflection; etching; large area silicon samples; optical properties; thin silver film; Etching; Fabrication; Optical reflection; Optical surface waves; Silicon; Silver;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5951207
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2254504