Title :
Product development of a MEMS optical scanner for a laser scanning microscope
Author :
Miyajima, H. ; Asaoka, N. ; Isokawa, T. ; Ogata, M. ; Aoki, Y. ; Imai, M. ; Fujimori, O. ; Katashiro, M. ; Matsumoto, K.
Author_Institution :
Olympus Opt. Co. Ltd., Tokyo, Japan
Abstract :
A MEMS electromagnetic optical scanner for horizontal scanning in a laser scanning microscope has been developed. Although few MEMS actuators have been commercialized to date, it has successfully satisfied all the specifications including not only the fundamentals such as resonant frequency and maximum scan angle but also those for a commercial product such as scanning stability and reliability. It will be commercialized as a part of our product, OLS1100 in the second half of FY 2001.
Keywords :
micro-optics; microactuators; micromechanical resonators; optical microscopes; optical scanners; MEMS actuators; MEMS optical scanner; OLS1100 product development; double-side polished SOI wafer; horizontal scanning; laser scanning confocal microscope; laser scanning microscope; maximum scan angle; reliability; resonant frequency; scanning stability; Coils; Commercialization; Fasteners; Micromechanical devices; Mirrors; Optical films; Optical microscopy; Optical sensors; Product development; Resonance;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984331
