Title :
Assembled corner-cube retroreflector quadruplet
Author :
Lixia Zhou ; Pister, K.S.J. ; Kahn, J.M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
A MEMS corner-cube retroreflector (CCR) is presented. It is used as a free-space optical communication transmitter in the Smart Dust project. The optical and electrical properties are greatly improved as compared to CCRs fabricated previously in the MUMPS process. Improvements include a tenfold improvement in mirror curvature, a threefold reduction of mirror misalignment, a fivefold reduction of drive voltage, a tenfold increase in resonant frequency, and an improved scalability due to the quadruplet design.
Keywords :
micro-optics; micromechanical resonators; mirrors; optical transmitters; silicon-on-insulator; MEMS corner-cube retroreflector; SOI technology; Smart Dust project; bottom mirror fabrication; drive voltage; electrical properties; free-space optical communication transmitter; mirror curvature; mirror misalignment; optical properties; quadruplet design; resonant frequency; scalability; Actuators; Assembly; Fasteners; Low voltage; Micromachining; Micromechanical devices; Mirrors; Optical device fabrication; Optical fiber communication; Optical transmitters;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984332
