Title :
Conformal grating electromechanical system (GEMS) for high-speed digital light modulation
Author :
Kowarz, M.W. ; Brazas, J.C., Jr. ; Phalen, J.G.
Author_Institution :
Integrated Mater. & Microstructures Lab., Eastman Kodak Co., Rochester, NY, USA
Abstract :
A diffractive optical MEMS device for spatial and temporal light modulation is described that is capable of high-speed digital operation. The device contains electromechanical ribbons suspended flat above a silicon substrate by a periodic series of intermediate supports. When actuated electrostatically, the ribbons conform around the support substructure to produce a grating. The device has optical switching times of less than 50 nsec, sub-nanosecond jitter, high optical contrast and efficiency, and reliable actuation in contact mode. The fine gray levels needed for digital imaging systems are produced by pulse width modulation.
Keywords :
diffraction gratings; electro-optical switches; electrostatic actuators; high-speed optical techniques; jitter; micro-optics; optical arrays; pulse width modulation; spatial light modulators; 50 ns; Si; Si substrate; conformal grating electromechanical system; diffractive optical MEMS device; digital imaging systems; electromechanical ribbons; electrostatic actuation; fine gray levels; high optical contrast; high-speed digital light modulation; optical switching times; periodic intermediate supports; pulse width modulation; reliable contact mode actuation; spatial light modulation; spatial light modulator; sub-nanosecond jitter; support substructure; temporal light modulation; throughput; Digital modulation; Electromechanical systems; Gratings; High speed optical techniques; Microelectromechanical devices; Optical devices; Optical diffraction; Optical modulation; Pulse width modulation; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984335
