A hybrid Silicon-On-Glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

Author

Junseok Chae ; Kulah, H. ; Najafi, K.

Author_Institution

Center for Wireless Integrated MicroSystems, Michigan Univ., Ann Arbor, MI, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

623

Lastpage

626

Abstract

A hybrid micro-accelerometer system consisting of a new bulk Silicon-On-Glass (SOG) lateral capacitive micro-accelerometer and a CMOS interface circuit is presented. The accelerometer has a 120 /spl mu/m-thick proof mass, 2.2 mm /spl times/ 3.0 mm in size with a 3.2 /spl mu/m sensing gap defined by DRIE. The circuit has a 95 dB dynamic range, a low offset of 370 /spl mu/V and can resolve better than 75 aF. The hybrid system has a measured sensitivity of 40 mV/g and resolution of 100 /spl mu/g//spl radic/(Hz).

Keywords

CMOS integrated circuits; accelerometers; inertial navigation; microsensors; readout electronics; sigma-delta modulation; sputter etching; switched capacitor networks; /spl Sigma/-/spl Delta/ switched-capacitor circuit; 2.2 mm; 3.0 mm; 3.2 micron; CMOS interface circuit; CMOS readout circuitry; DRIE; Si; dynamic range; hybrid SOG lateral micro-accelerometer; inertial sensors; low offset; proof mass; resolution; sensing gap; sensitivity; Acceleration; Accelerometers; Circuits; DH-HEMTs; Fabrication; Fingers; Noise reduction; Seismic measurements; Silicon; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984348

Filename

984348