Micro-power wireless transmitter for high-temperature MEMS sensing and communication applications

Author

Suster, M. ; Young, D.J. ; Ko, W.H.

Author_Institution

Dept. of EECS, Case Western Reserve Univ., Cleveland, OH, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

641

Lastpage

644

Abstract

A low-power silicon-tunnel-diode-based LC-tuned oscillator transmitter is proposed for high-temperature MEMS sensing and wireless data transmission applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a miniature on-board coil loop serving as the inductor for the LC tank and also a transmitting antenna. The system achieves telemetry performance up to 290/spl deg/C over a distance of 2.5 meters with a total power consumption of 110 /spl mu/W.

Keywords

elemental semiconductors; microsensors; mobile radio; pressure sensors; radio transmitters; silicon; telemetry; tunnel diode oscillators; 110 muW; 2.5 m; 290 C; LC tank; LC-tuned oscillator transmitter; MEMS sensing; Si; Si capacitive pressure sensor; distance 2.5 meters; frequency conversion; high-temperature MEMS; miniature on-board coil loop; power consumption 110 /spl mu/W; telemetry performance; transmitting antenna; up to 290/spl deg/C; wireless data transmission; Capacitive sensors; Coils; Data communication; Frequency conversion; Micromechanical devices; Oscillators; Prototypes; Silicon; Transmitters; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984352

Filename

984352