Title :
Design of a low-cost MEMS monolithically-integrated relative humidity sensor
Author :
Cicek, Paul-Vahé ; Saha, Tanmoy ; Waguih, Bichoy ; Nabki, Frederic ; El-Gamal, Mourad N.
Author_Institution :
McGill Univ., Montreal, QC, Canada
Abstract :
This paper presents MEMS capacitive-based humidity sensors for monolithic integration with CMOS electronics. The fabrication process and design of the sensors are described. Performance is evaluated with theoretical analysis and finite-elements simulation. The design achieves a sensitivity greater than 0.225%/%RH and a response time faster than 1 s.
Keywords :
CMOS integrated circuits; finite element analysis; humidity sensors; microsensors; monolithic integrated circuits; CMOS electronics; MEMS capacitive-based humidity sensor; finite element simulation; low cost MEMS monolithically integrated relative humidity sensor; Capacitance; Electrodes; Humidity; Moisture; Sensitivity; Sensors; Time factors; Humidity; MEMS; integration; sensor;
Conference_Titel :
Microelectronics (ICM), 2010 International Conference on
Conference_Location :
Cairo
Print_ISBN :
978-1-61284-149-6
DOI :
10.1109/ICM.2010.5696107
