Title :
A high-performance MEMS transformer for silicon RF ICS
Author :
Yun-Seok Choi ; Jun-Bo Yoon ; Byeong-Il Kim ; Euisik Yoon
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
Abstract :
A new spiral-type suspended transformer for silicon radio frequency integrated circuits (RF ICs) has been fabricated by surface micromachining technology The fabricated transformer on standard silicon substrate has shown a low insertion loss of 1.9 dB at 1 GHz by reducing substrate coupling and ohmic loss using the proposed MEMS technology. Equivalent circuit models for the spiral-type suspended transformer have been extracted and shown that they agree well with measured characteristics.
Keywords :
elemental semiconductors; equivalent circuits; micromachining; micromechanical devices; radio equipment; silicon; substrates; transformers; 1 GHz; 1.9 dB; MEMS; Si; Si RF ICs; Si substrate; equivalent circuit; insertion loss 1.9dB; ohmic loss; spiral-type suspended transformer; substrate coupling; surface micromachining; Coils; Conductivity; Insertion loss; Integrated circuit technology; Magnetic flux; Micromechanical devices; Power transformer insulation; Radio frequency; Radiofrequency integrated circuits; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984355
