CVD polycrystalline diamond high-Q micromechanical resonators

Author

Jing Wang ; Butler, J.E. ; Hsu, D.S.Y. ; Nguyen, T.-C.

Author_Institution

Center for Integrated Wireless Microsyst., Michigan Univ., Ann Arbor, MI, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

657

Lastpage

660

Abstract

Chemical Vapor Deposited (CVD) polycrystalline diamond material, with an acoustic velocity higher than that of polycrystalline silicon, has been utilized as the structural material for clamped-clamped beam (CC-beam) micromechanical resonators with measured resonance frequencies from 2.7 MHz to 9.8 MHz, and Q´s up to 6,225-easily on par with that of previous polysilicon resonators in this frequency range. In addition to CC-beams, CVD polydiamond folded-beam /spl mu/mechanical resonators are also demonstrated with Q´s in the range of 20,000. With its higher acoustic velocity, polydiamond has great potential for more easily achieving the coveted UHF frequencies (0.3-3 GHz) required for use in wireless communication transceivers.

Keywords

CVD coatings; diamond; elemental semiconductors; micromechanical resonators; mobile radio; transceivers; 0.3 to 3 GHz; 2.7 to 9.8 MHz; C; CVD polydiamond resonators; UHF frequencies; acoustic velocity; clamped-clamped beam; folded-beam microresonators; micromechanical resonators; polycrystalline diamond material; polycrystalline silicon; polysilicon resonators; resonance frequencies 2.7 MHz to 9.8 MHz; wireless communication transceivers; Acoustic beams; Acoustic materials; Acoustic measurements; Chemical vapor deposition; Frequency measurement; Micromechanical devices; Resonance; Resonant frequency; Silicon; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984356

Filename

984356