DocumentCode
2255233
Title
New structure for DC-65 GHz thermal power sensor
Author
Kodato, Setsuo ; Wakabayashi, Takashi ; Zhuang, Qingde ; Uchida, Seiji
Author_Institution
Anritsu Corp., Kanagawa, Japan
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
1279
Abstract
We have developed a new structure thermopile-type thermal power sensor for the millimeter wave range (de to 65 GHz). It consists of a ceramic substrate, metal and microcrystalline-SiGe thin films. Both fast or high-sensitivity sensors can be manufactured
Keywords
Ge-Si alloys; electric sensing devices; microsensors; millimetre wave detectors; semiconductor materials; thermopiles; ceramic substrate; high-sensitivity sensors; millimeter wave range; mm-wave power detection; thermal power sensor; thermopile-type sensor; Electric resistance; Frequency; Millimeter wave measurements; Power measurement; Resistance heating; Sensor phenomena and characterization; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635469
Filename
635469
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