A multi-channel micro valve for micro pneumatic artificial muscle

A miniaturized Mckibben artificial muscle pneumatic actuator of 1 mm in diameter and a micromachined high-power multi-channel micro valve have been developed. The pneumatic actuator can make a contraction of 21% of its length and generate contraction force of 3.8 N when it is pressurized at 0.6 MPa. The micro valve of 19 mm x 25 mm x 2 mm has six channels. Its maximum allowable pressure and flow rate are 0.6 MPa and 830 cc/min, respectively. The actuators and the valve are integrated and applied to a skeletal hand.