An integrated microelectromechanical resonant output gyroscope

Author

Seshia, A.A. ; Howe, R.T. ; Montague, S.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

722

Lastpage

726

Abstract

We describe the principle of operation and experimental characterization of an integrated micromechanical vibratory rate gyroscope based on resonant sensing of the Coriolis force. The new design has several advantages over rate gyroscopes that utilize open-loop displacement sensing for rotation rate measurement. Some of these advantages include simpler dynamics and control, improved scale factor stability, large dynamic range, high resolution, and a quasi-digital FM output. A z-axis integrated surface-micromachined gyroscope fabricated at the Sandia National Laboratories has a measured noise floor of 0.3 deg/sec//spl radic/(Hz).

Keywords

Coriolis force; gyroscopes; micromachining; microsensors; vibrations; Coriolis force; integrated microelectromechanical vibratory rate gyroscope; resonant sensing; surface micromachining; Displacement measurement; Dynamic range; Gyroscopes; Laboratories; Micromechanical devices; Noise measurement; Open loop systems; Resonance; Rotation measurement; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984372

Filename

984372