DocumentCode
2255546
Title
2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497)
fYear
2001
fDate
5-7 Dec. 2001
Keywords
dielectric materials; micromechanical devices; microwave devices; nanotechnology; optoelectronic devices; organic semiconductors; semiconductor device models; semiconductor devices; semiconductor technology; silicon-on-insulator; submillimetre wave devices; wide band gap semiconductors; MEMS; SOI technology; SiC; THz devices; device research; dielectrics; high frequency devices; magnetics; nanoelectronics; nitrides; optoelectronics; organic semiconductors; oxides; silicon device modeling; silicon processing; wide band-gap materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2001 International
Conference_Location
Washington, DC, USA
Print_ISBN
0-7803-7432-0
Type
conf
DOI
10.1109/ISDRS.2001.984423
Filename
984423
Link To Document