Title :
Optimization of SiNx planar microdisk high Q resonators for chipscale visible integrated photonics
Author :
Hosseini, Ehsan Shah ; Yegnanarayanan, Siva ; Soltani, Mohammad ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
Ultra-high Q (>5 times 105) microdisk resonators are demonstrated in a SiNx platform at 650 nm with integrated in-plane coupling waveguides on a Si substrate. Critical coupling to first-order radial-mode is demonstrated using pedestal layer to control coupling.
Keywords :
integrated optoelectronics; micro-optics; optical couplers; optical materials; optical planar waveguides; optical resonators; silicon compounds; visible spectra; Si; SiNx; chip-scale visible integrated photonics; first-order radial mode coupling; integrated in-plane coupling waveguides; pedestal layer; ultra-high Q microdisk resonators; wavelength 650 nm; Etching; Optical coupling; Optical materials; Optical refraction; Optical resonators; Optical waveguides; Photonics; Q factor; Silicon; Waveguide discontinuities; (130.3120) Integrated optics devices; (230.5750) Resonators;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
