Title :
Electronic spectrum of defects in SiOCH dielectric films measured by deep level transient spectroscopy
Author :
Ligatchev, V.A. ; Wong, T.K.S. ; Liu, B. ; Rusli
Author_Institution :
Nanyang Technological University
fDate :
30 June-5 July 2002
Keywords :
Atomic measurements; Dielectric films; Dielectric materials; Dielectric measurements; Electrochemical impedance spectroscopy; Electrons; Plasma applications; Radio frequency; Semiconductor films; Silicon;
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
DOI :
10.1109/SIM.2002.1242744
