Title :
The capacitance-voltage characteristics of metal-ferroelectric-insulator-silicon structures for non-volatile memory applications
Author :
Hou, ChunLin ; Lee, Joseph Yamin
Author_Institution :
Tsing-Hua University
fDate :
30 June-5 July 2002
Keywords :
Capacitance-voltage characteristics; Dielectric thin films; Ferroelectric materials; Hysteresis; Insulation; Nonvolatile memory; Polarization; Pollution measurement; Sputtering; Voltage;
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
DOI :
10.1109/SIM.2002.1242751