DocumentCode
2257374
Title
Two- and three-dimensional arrays of nanoscale as clusters in low-temperature grown GaAs
Author
Bert, N.A. ; Cherkashin, N.A. ; Chaldyshev, V.V. ; Claverie, A. ; Preobrazhenskii, V.V. ; Putyato, A. ; Semyagin, B.R. ; Werner, Philipp
Author_Institution
loffe Physico-Technical Institute
fYear
2002
fDate
30 June-5 July 2002
Firstpage
233
Lastpage
236
Keywords
Annealing; Atomic layer deposition; Doping; Gallium arsenide; Microstructure; Molecular beam epitaxial growth; Monitoring; Physics; Temperature dependence; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN
0-7803-7418-5
Type
conf
DOI
10.1109/SIM.2002.1242762
Filename
1242762
Link To Document