DocumentCode :
2257374
Title :
Two- and three-dimensional arrays of nanoscale as clusters in low-temperature grown GaAs
Author :
Bert, N.A. ; Cherkashin, N.A. ; Chaldyshev, V.V. ; Claverie, A. ; Preobrazhenskii, V.V. ; Putyato, A. ; Semyagin, B.R. ; Werner, Philipp
Author_Institution :
loffe Physico-Technical Institute
fYear :
2002
fDate :
30 June-5 July 2002
Firstpage :
233
Lastpage :
236
Keywords :
Annealing; Atomic layer deposition; Doping; Gallium arsenide; Microstructure; Molecular beam epitaxial growth; Monitoring; Physics; Temperature dependence; Temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
Type :
conf
DOI :
10.1109/SIM.2002.1242762
Filename :
1242762
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2257374
