Optimizing surface acoustic wave sensors for trace chemical detection

Author

Frye, Gregory C. ; Kottenstette, Richard J. ; Heller, Edwin J. ; Brinker, C. Jeffrey ; Casalnuovo, Stephen A. ; Sellinger, Alan ; Raman, Narayan K. ; Lu, Yunfeng

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1323

Abstract

This paper describes several recent advances for fabricating coated surface acoustic wave (SAW) sensors for applications requiring trace chemical detection. Specifically, we have demonstrated that high surface area microporous oxides can provide 100-fold improvements in SAW sensor responses compared with more typical polymeric coatings. In addition, we fabricated GaAs SAW devices with frequencies up to 500 MHz to provide greater sensitivity and an ideal substrate for integration with high-frequency electronics

Keywords

chemical sensors; gallium arsenide; porous materials; surface acoustic wave sensors; 500 MHz; GaAs; SAW sensor response; coated surface sensor; microporous oxides; surface acoustic wave sensors; trace chemical detection; Acoustic sensors; Acoustic signal detection; Acoustic waves; Chemical sensors; Coatings; Gallium arsenide; Polymer films; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635480

Filename

635480