• DocumentCode
    2257541
  • Title

    The fabrication and characterization of metal-oxide semiconductor field-effect transistors and gated diodes using (Ba0.5,Sr0.5)TiOsub 3/ gate dielectric

  • Author

    Liu, Yu-Rung ; Lee, Joseph Ya-min

  • Author_Institution
    Tsing-Hua University
  • fYear
    2002
  • fDate
    30 June-5 July 2002
  • Firstpage
    288
  • Lastpage
    291
  • Keywords
    Binary search trees; Dielectric constant; Dielectric measurements; FETs; Fabrication; MOS devices; MOSFETs; Semiconductor diodes; Sputtering; Strontium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
  • Print_ISBN
    0-7803-7418-5
  • Type

    conf

  • DOI
    10.1109/SIM.2002.1242773
  • Filename
    1242773
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2257541