Title :
Microsystems for chemistry and energy applications
Author :
Jensen, Klavs F.
Author_Institution :
Dept. of Chem. Eng., MIT, Cambridge, MA, USA
Abstract :
Microfabrication techniques and scale-up by replication have fueled spectacular advances in the electronics industry and more recently in microanalysis chips for chemical and biological applications. Miniaturization of chemical analytic devices in micro-total-analysis-systems (μTAS) represents a natural extension of microfabrication technology to chemistry and biology with obvious applications in combinatorial chemistry, high throughput screening, and portable analytical measurement devices. The merging of μTAS techniques with microreaction technology promises to yield a wide range of novel devices for high throughput screening, reaction kinetic and mechanism studies, and on-line monitoring of production systems
Keywords :
biomedical electronics; chemical analysis; micromachining; micromechanical devices; portable instruments; replica techniques; biological applications; chemical analytic devices; chemistry applications; energy applications; micro-total-analysis-systems; microanalysis chips; microfabrication techniques; microsystems; miniaturization; portable analytical measurement devices; replication; scale-up; Biochemical analysis; Chemical analysis; Chemical industry; Chemical technology; Chemistry; Electronics industry; Kinetic theory; Merging; Semiconductor device measurement; Throughput;
Conference_Titel :
Semiconductor Device Research Symposium, 2001 International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-7432-0
DOI :
10.1109/ISDRS.2001.984533
