• DocumentCode
    2258174
  • Title

    A MEMS-based programmable diffraction grating for optical holography in the spectral domain

  • Author

    Butler, M.A. ; Senturia, S.D. ; Deutsch, E.R. ; Sinclair, M.B. ; Sweatt, W.C. ; Youngner, D.W. ; Hocker, G.B.

  • Author_Institution
    Polychromix, Inc, Woburn, MA, USA
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    422
  • Abstract
    Summary form only given. Spatial holography stores the shape of an object by recording the phase profile of a monochromatic optical beam. Similarly, the spectral content of an optical beam can be recreated from a stored phase profile of a polychromatic optical beam. Such phase profiles have been created by etching silicon and also with a MEMS-based programmable, diffraction grating. This talk will describe how phase profiles are create to reproduce specific spectral profiles, the development of the programmable diffraction grating, and several potential applications of such a technology
  • Keywords
    holographic gratings; masks; micromechanical devices; MEMS-based programmable diffraction grating; optical holography; polychromatic optical beam; spectral domain; spectral profiles; stored phase profile; Chemicals; Diffraction gratings; Frequency; Holographic optical components; Holography; Lighting control; Optical beams; Optical diffraction; Optical sensors; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2001 International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    0-7803-7432-0
  • Type

    conf

  • DOI
    10.1109/ISDRS.2001.984534
  • Filename
    984534