Title :
Nonuniformity of commercial SOI wafers manifested by photoluminescence and lifetime mapping
Author :
Li, Z.Q. ; Tajima, M. ; Warashina, M. ; Sumie, S. ; Hashizume, H. ; Ogura, A.
Author_Institution :
Inst. of Space & Astronaut. Sci., Sagamihara, Japan
fDate :
29 Sept.-2 Oct. 2003
Abstract :
In this paper, nonuniformity of commercial SOI wafers manifested by photoluminescence and lifetime mapping were studied.
Keywords :
elemental semiconductors; photoluminescence; silicon-on-insulator; SOI wafers; Si; lifetime mapping; photoluminescence; Photoluminescence; Silicon on insulator technology;
Conference_Titel :
SOI Conference, 2003. IEEE International
Print_ISBN :
0-7803-7815-6
DOI :
10.1109/SOI.2003.1242927
