Chemical sensors based on surface plasmon resonance in Si grating structures

Author

Nikitin, Petr I. ; Anokhin, Paval M. ; Beloglazov, Anatoli A.

Author_Institution

Gen. Phys. Inst., Acad. of Sci., Moscow, Russia

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1359

Abstract

The new concept of a Si-based surface plasmon resonance (SPR) sensor has been developed and successfully applied to chemical sensing. The sensitivity to nitrogen dioxide has been estimated at the level of tens of ppb. The Si-based SPR scheme provides an additional surface-enhanced Raman scattering (SERS) channel for data acquisition with spectroscopic selectivity and amplified sensitivity. Using two different SPR methods, the effect of reversible interaction of gold films with ppm concentrations of NO₂ in air has been observed for the first time. The effect is likely to be associated with the gold film structure on an atomic scale and the nature of NO₂ as a strong electroactive gas

Keywords

elemental semiconductors; gas sensors; nitrogen compounds; silicon; surface enhanced Raman scattering; surface plasmons; Au; Au films; NO₂; Si; Si grating structures; Si-based surface plasmon resonance sensor; air; amplified sensitivity; atomic scale; chemical sensing; chemical sensors; data acquisition; reversible interaction; sensitivity; spectroscopic selectivity; strong electroactive gas; surface plasmon resonance; surface-enhanced Raman scattering; Biomedical optical imaging; Chemical sensors; Gratings; Optical films; Optical sensors; Optical surface waves; Plasmons; Raman scattering; Resonance; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635489

Filename

635489