Title :
Excimer laser micromachining of glass substrates
Author :
Bhatt, Deepa ; Williams, Karen ; Hutt, David A. ; Conway, Paul P.
Author_Institution :
Wolfson Sch. of Mech. & Manuf. Eng., Loughborough Univ., Loughborough
Abstract :
Excimer laser machining of microvias and tracks in CMZ glass (100 mum thick) at 248 nm has been investigated and optimised in order to minimise hole taper, microcracking and debris.
Keywords :
cracks; excimer lasers; glass; laser beam machining; micromachining; excimer laser micromachining; glass substrates; hole taper; microcracking; wavelength 248 nm; Fiber lasers; Glass; Laser beams; Laser modes; Laser theory; Machining; Micromachining; Optical interconnections; Optical materials; Sheet materials; (140.0140) Lasers and laser optics; (140.2180) Excimer Lasers;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
