DocumentCode
2260115
Title
Excimer laser micromachining of glass substrates
Author
Bhatt, Deepa ; Williams, Karen ; Hutt, David A. ; Conway, Paul P.
Author_Institution
Wolfson Sch. of Mech. & Manuf. Eng., Loughborough Univ., Loughborough
fYear
2008
fDate
4-9 May 2008
Firstpage
1
Lastpage
2
Abstract
Excimer laser machining of microvias and tracks in CMZ glass (100 mum thick) at 248 nm has been investigated and optimised in order to minimise hole taper, microcracking and debris.
Keywords
cracks; excimer lasers; glass; laser beam machining; micromachining; excimer laser micromachining; glass substrates; hole taper; microcracking; wavelength 248 nm; Fiber lasers; Glass; Laser beams; Laser modes; Laser theory; Machining; Micromachining; Optical interconnections; Optical materials; Sheet materials; (140.0140) Lasers and laser optics; (140.2180) Excimer Lasers;
fLanguage
English
Publisher
iet
Conference_Titel
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-859-9
Type
conf
Filename
4572501
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