DocumentCode :
2260674
Title :
Design and modeling of a high-speed scanner for atomic force microscopy
Author :
Schitter, Georg ; Åström, Karl J. ; DeMartini, Barry ; Fantner, Georg E. ; Turner, Kimberly ; Thurner, Philipp J. ; Hansma, Paul K.
Author_Institution :
Dept. of Phys., California Univ., Santa Barbara, CA
fYear :
2006
fDate :
14-16 June 2006
Abstract :
A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The X and Y scan ranges are 13 micrometers and the Z range is 4.3 micrometers. The focus of this contribution is on the vertical positioning direction of the scanner, being the crucial axis of motion with the highest bandwidth and precision requirements for gentle imaging with the atomic force microscope. A mathematical model of the scanner dynamics is presented that will enable more accurate topography measurements with the high-speed AFM system
Keywords :
atomic force microscopy; control system synthesis; image scanners; motion control; physical instrumentation control; position control; atomic force microscopy; high-speed scanner; motion axis; scanner dynamics; topography measurements; vertical positioning direction; Adaptive control; Atomic force microscopy; Atomic measurements; Biological materials; Feedback; Mathematical model; Physics; Resonance; Resonant frequency; Surfaces;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
American Control Conference, 2006
Conference_Location :
Minneapolis, MN
Print_ISBN :
1-4244-0209-3
Electronic_ISBN :
1-4244-0209-3
Type :
conf
DOI :
10.1109/ACC.2006.1655406
Filename :
1655406
Link To Document :
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