• DocumentCode
    2260875
  • Title

    A physically-based model for drift in Al2O3-gate pH ISFET´s

  • Author

    Jamasb, Shahriar ; Collins, Scott D. ; Smith, Rosesmary L.

  • Author_Institution
    California Univ., Davis, CA, USA
  • Volume
    2
  • fYear
    1997
  • fDate
    16-19 Jun 1997
  • Firstpage
    1379
  • Abstract
    A physical model is presented which quantitatively describes drift in Al2O3-gate pH ISFET´s. Drift is postulated to be associated with a chemical modification of the Al2O3 surface as a result of exposure to the aqueous electrolyte. The time dependence of drift is modeled by a hopping transport mechanism, known as dispersive transport. Chemical modification of the Al2 O3 surface leads to a change in the overall insulator capacitance with time, which gives rise to a monotonic temporal change in the threshold voltage of the ISFET. The validity of the proposed model is experimentally tested by fitting measured drift characteristics of Al2O3-gate pH ISFET´s and examining the physical plausibility of the fitting parameters
  • Keywords
    MOSFET; alumina; biomedical equipment; biomedical measurement; biosensors; chemical sensors; ion sensitive field effect transistors; pH measurement; semiconductor device models; Al2O3; Al2O3 surface; Al2O3-gate pH ISFET; ISFET-based biomedical sensor; aqueous electrolyte; blood pH; chemical modification; dispersive transport; drift; fitting parameters; hopping transport mechanism; insulator capacitance; monotonic temporal change; physically-based model; threshold voltage; time dependence; Biomedical measurements; Biosensors; Capacitance; Chemicals; Dielectrics and electrical insulation; Dispersion; Logic; Surface fitting; Testing; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
  • Conference_Location
    Chicago, IL
  • Print_ISBN
    0-7803-3829-4
  • Type

    conf

  • DOI
    10.1109/SENSOR.1997.635494
  • Filename
    635494