DocumentCode
2261315
Title
High speed, compact, adaptive optics using MEMS silicon deformable mirrors
Author
Dimas, C. ; Bierden, P. ; Bifano, T. ; Perrault, J. ; Riemann, G.
Author_Institution
Boston Micromachines Corp., Watertown, MA, USA
fYear
2002
fDate
24-24 May 2002
Abstract
Summary form only given. A MEMS deformable mirror (DM) having good optical quality was used for compensation of static aberrations in an optical system. The MEMS DM, manufactured by Boston Micromachines Corporation, is a 140 actuator, continuous silicon mirror. Its optoelectromechanical performance characteristics have been detailed elsewhere.
Keywords
aberrations; adaptive optics; micro-optics; micromechanical devices; mirrors; silicon; MEMS; Si; actuator; compensation; continuous silicon mirror; good optical quality; optical system; optoelectromechanical performance characteristics; silicon deformable mirrors; static aberrations; Adaptive optics; Delta modulation; High speed optical techniques; Micromechanical devices; Mirrors; Optical distortion; Optical feedback; Optical interferometry; Optical sensors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location
Long Beach, CA, USA
Print_ISBN
1-55752-706-7
Type
conf
DOI
10.1109/CLEO.2002.1033440
Filename
1033440
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