Title :
High speed, compact, adaptive optics using MEMS silicon deformable mirrors
Author :
Dimas, C. ; Bierden, P. ; Bifano, T. ; Perrault, J. ; Riemann, G.
Author_Institution :
Boston Micromachines Corp., Watertown, MA, USA
Abstract :
Summary form only given. A MEMS deformable mirror (DM) having good optical quality was used for compensation of static aberrations in an optical system. The MEMS DM, manufactured by Boston Micromachines Corporation, is a 140 actuator, continuous silicon mirror. Its optoelectromechanical performance characteristics have been detailed elsewhere.
Keywords :
aberrations; adaptive optics; micro-optics; micromechanical devices; mirrors; silicon; MEMS; Si; actuator; compensation; continuous silicon mirror; good optical quality; optical system; optoelectromechanical performance characteristics; silicon deformable mirrors; static aberrations; Adaptive optics; Delta modulation; High speed optical techniques; Micromechanical devices; Mirrors; Optical distortion; Optical feedback; Optical interferometry; Optical sensors; Silicon;
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
DOI :
10.1109/CLEO.2002.1033440
