Title :
Continuous and agile beam steerable diode lasers
Author :
Sakaue, T. ; Hung, J.S.P. ; Ku, P.C. ; Hernandez, J. ; Chang-Hasnain, C.J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
Summary from only given. This paper demonstrates the first monolithically fabricated laser beam steering device based on GaAs-based MEMS. Since the laser and actuator are monolithically integrated, this device can be potentially cost effective and scalable. Other GaAs-based devices integrated with MEMS have been reported. This paper represents the first integration with an edge-emitting laser.
Keywords :
III-V semiconductors; beam steering; gallium arsenide; integrated optoelectronics; laser beams; micro-optics; micromechanical devices; semiconductor lasers; GaAs; GaAs-based MEMS; GaAs-based devices; actuator; cost effective; edge-emitting laser; laser; monolithically fabricated laser beam steering device; monolithically integrated; Acoustic beams; Actuators; Beam steering; Diode lasers; Laser beams; Micromechanical devices; Mirrors; Resonant frequency; Surface emitting lasers; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
DOI :
10.1109/CLEO.2002.1033443
