EUV photoelectron micro-spectroscopy with a laser-produced plasma source

Summary form only given. In Tomie-type photoelectron spectroscopy, EUPS (EUV photoelectron spectroscopy), a laser-produced plasma emitting discrete emission lines is employed as an EUV source and a single narrow band line is selected using a filter with a high transmission. The electron energy spectrum is analyzed by a time-of-flight (TOF) method in which all electrons can be collected theoretically. Thus, high efficiencies in monochromatizing excitation photons and in analyzing electron energies should be realized. Very recently, we have successfully obtained a high energy resolution TOF photoelectron spectrum from a gold sample irradiated by a sub-micron 16-nm EUV beam focused with a Schwarzschild optic.