DocumentCode :
2262489
Title :
Session I: Semiconductor Materials and Technologies for Building the Sensors and Microsystems
fYear :
2005
fDate :
1-5 July 2005
Firstpage :
11
Lastpage :
11
Abstract :
Start of the above-titled section of the conference proceedings record.
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
Conference_Location :
Erlagol, Altai, Russia
ISSN :
1815-3712
Print_ISBN :
5-7782-0491-4
Type :
conf
DOI :
10.1109/SIBEDM.2005.195567
Filename :
1523172
Link To Document :
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