DocumentCode
2262560
Title
Initial stages of nanoislands formation on Si(111) 7×7 surface
Author
Vershinin, Andrey V. ; Teys, Sergey A. ; Shwartz, Natalia L. ; Yanovitskaja, Zoya Sh ; Zverev, Alexey V.
Author_Institution
Novosibirsk State Tech. Univ., Russia
fYear
2005
fDate
1-5 July 2005
Firstpage
27
Lastpage
29
Abstract
Investigation of a minimal stable nucleus on Si(111)-7×7 surface was carried out by interatomic potential calculations and STM image analyses. Potential relief for adatom diffusion through this surface was calculated using Tersoff potential. Calculations demonstrated that a tetramer formed in the center of 7×7 unit cell after low deposited dose may be considered as a minimal stable nucleus on Si(111)-7×7 surface.
Keywords
elemental semiconductors; island structure; potential energy functions; scanning tunnelling microscopy; silicon; surface diffusion; STM image analyses; Si; Si(111) surface; Tersoff potential; adatom diffusion; interatomic potential calculations; minimal stable nucleus; nanoislands formation; potential relief; Atomic layer deposition; Cleaning; Helium; Image analysis; Image reconstruction; Physics; Silicon; Surface reconstruction; Vacuum systems; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
ISSN
1815-3712
Print_ISBN
5-7782-0491-4
Type
conf
DOI
10.1109/SIBEDM.2005.195571
Filename
1523176
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