• DocumentCode
    2262560
  • Title

    Initial stages of nanoislands formation on Si(111) 7×7 surface

  • Author

    Vershinin, Andrey V. ; Teys, Sergey A. ; Shwartz, Natalia L. ; Yanovitskaja, Zoya Sh ; Zverev, Alexey V.

  • Author_Institution
    Novosibirsk State Tech. Univ., Russia
  • fYear
    2005
  • fDate
    1-5 July 2005
  • Firstpage
    27
  • Lastpage
    29
  • Abstract
    Investigation of a minimal stable nucleus on Si(111)-7×7 surface was carried out by interatomic potential calculations and STM image analyses. Potential relief for adatom diffusion through this surface was calculated using Tersoff potential. Calculations demonstrated that a tetramer formed in the center of 7×7 unit cell after low deposited dose may be considered as a minimal stable nucleus on Si(111)-7×7 surface.
  • Keywords
    elemental semiconductors; island structure; potential energy functions; scanning tunnelling microscopy; silicon; surface diffusion; STM image analyses; Si; Si(111) surface; Tersoff potential; adatom diffusion; interatomic potential calculations; minimal stable nucleus; nanoislands formation; potential relief; Atomic layer deposition; Cleaning; Helium; Image analysis; Image reconstruction; Physics; Silicon; Surface reconstruction; Vacuum systems; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
  • ISSN
    1815-3712
  • Print_ISBN
    5-7782-0491-4
  • Type

    conf

  • DOI
    10.1109/SIBEDM.2005.195571
  • Filename
    1523176