DocumentCode
2263214
Title
The ultrasonic sputtering of liquid
Author
Khmelev, Vladimir N. ; Shalunov, Andrey V. ; Barsukov, Roman V. ; Tsyganok, Sergey N. ; Slivin, Aleksey N.
Author_Institution
Biysk Technol. Inst., Altay State Tech. Univ., Russia
fYear
2005
fDate
1-5 July 2005
Firstpage
127
Lastpage
130
Abstract
This article is devoted to the problem of viscous liquids sputtering by high intensity ultrasonic oscillations. Theoretical analysis shows the way of efficient increasing due to an optimum criteria of the cavitation process control choice. The results of the carried out researches can confirm the reliability of the chosen criteria and the peak efficiency of the viscous liquids ultrasonic dispersion process.
Keywords
liquids; oscillations; sputtering; ultrasonic applications; ultrasonic devices; viscosity; cavitation process control; high intensity ultrasonic oscillations; ultrasonic dispersion process; ultrasonic sputtering; viscous liquids sputtering; Aerosols; Fuel processing industries; Helium; Liquids; Metals industry; Process control; Productivity; Senior members; Spraying; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2005. Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on
ISSN
1815-3712
Print_ISBN
5-7782-0491-4
Type
conf
DOI
10.1109/SIBEDM.2005.195601
Filename
1523206
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