Title :
Polymer waveguide optical interconnections on Si CMOS circuits
Author :
Sang-Yeon Cho ; Thomas, M. ; Dae-Ik Kim ; Jokerst, N.M. ; Brooke, M.
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Summary form only given. We report demonstrations of optical interconnections on foundry Si CMOS circuits using polymer optical waveguides. The polymer optical waveguides were directly fabricated on two Si CMOS circuits. The cladding/planarization layer was benzocyclobutene (BCB) and polyetherimide (ULTEM) was used as the waveguide core material.
Keywords :
CMOS integrated circuits; integrated circuit technology; integrated optoelectronics; optical fabrication; optical interconnections; optical polymers; optical waveguides; silicon; BCB; Si; Si CMOS circuits; ULTEM; benzocyclobutene; cladding/planarization layer; foundry Si CMOS circuits; optical interconnections; polyetherimide; polymer optical waveguides; waveguide core material; Biomedical optical imaging; Integrated circuit interconnections; Integrated optics; Optical interconnections; Optical polymers; Optical scattering; Optical sensors; Optical surface waves; Optical waveguides; Substrates;
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
DOI :
10.1109/CLEO.2002.1033562
