Title :
Biofilter technology: an innovative and real cost-effective system to remove VOCs (ES07)
Author :
Jantschak, A. ; Daniels, Mats
fDate :
30 Sept.-2 Oct. 2003
Abstract :
The Biofilter system is a real cost-effective system with excellent efficiency for VOC treatment. The Biofilter is the best technology for environmental protection and meets all requirements of German and European law. The application of this new technique in the semiconductor industry was an interesting challenge for the project team at Philips Semiconductors Hamburg (PSH). The results of this project demonstrate that it is possible to establish this innovative technology in the semiconductor industry.
Keywords :
electronics industry; environmental factors; filtration; legislation; organic compounds; European law; German law; Philips Semiconductors Hamburg; VOCs (ES07); biofilter technology; environmental protection; semiconductor industry; volatile organic compounds; Biological systems; Chemical technology; Combustion; Costs; Electronics industry; Europe; Law; Legal factors; Oxidation; Volatile organic compounds;
Conference_Titel :
Semiconductor Manufacturing, 2003 IEEE International Symposium on
Print_ISBN :
0-7803-7894-6
DOI :
10.1109/ISSM.2003.1243220
