Application of hydrogenated water to united water supply system for high performance and step-by-step investment type system LSI manufacturing fab

Author

Yamazaki, Yasuyuki ; Sugawa, Shigetoshi ; Ohmi, Tadahiro

fYear

2003

fDate

30 Sept.-2 Oct. 2003

Firstpage

14

Lastpage

17

Abstract

This study was carried on to contribute the application of hydrogenated water to future water supply system. It shows that using hydrogenated water can perfectly control flowing out from surface for all pipe line materials, so that its application enables cooling water system to unite with ultrapure water (UPW) system for a high performance and step-by-step investment type system LSI manufacturing fab (HPSI-fab) preventing metal contamination in the pipe. It reveals that energy consumption and space for the system are reduced by 20% and 45% respectively compared with a current system. It can achieve initial and running cost reduction and ESH (Environment, Safety and Health) promotion in HPSI-fab.

Keywords

contamination; cost reduction; electronics industry; energy conservation; environmental factors; integrated circuit manufacture; large scale integration; water; water supply; H₂O; LSI manufacturing fab; cost reduction; hydrogenated water; metal contamination prevention; pipe line materials; water supply system; Control systems; Cooling; Energy consumption; Inorganic materials; Investments; Large scale integration; Manufacturing; Surface contamination; Temperature control; Water pollution;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2003 IEEE International Symposium on

ISSN

1523-553X

Print_ISBN

0-7803-7894-6

Type

conf

DOI

10.1109/ISSM.2003.1243221

Filename

1243221