Title :
Application of hydrogenated water to united water supply system for high performance and step-by-step investment type system LSI manufacturing fab
Author :
Yamazaki, Yasuyuki ; Sugawa, Shigetoshi ; Ohmi, Tadahiro
fDate :
30 Sept.-2 Oct. 2003
Abstract :
This study was carried on to contribute the application of hydrogenated water to future water supply system. It shows that using hydrogenated water can perfectly control flowing out from surface for all pipe line materials, so that its application enables cooling water system to unite with ultrapure water (UPW) system for a high performance and step-by-step investment type system LSI manufacturing fab (HPSI-fab) preventing metal contamination in the pipe. It reveals that energy consumption and space for the system are reduced by 20% and 45% respectively compared with a current system. It can achieve initial and running cost reduction and ESH (Environment, Safety and Health) promotion in HPSI-fab.
Keywords :
contamination; cost reduction; electronics industry; energy conservation; environmental factors; integrated circuit manufacture; large scale integration; water; water supply; H2O; LSI manufacturing fab; cost reduction; hydrogenated water; metal contamination prevention; pipe line materials; water supply system; Control systems; Cooling; Energy consumption; Inorganic materials; Investments; Large scale integration; Manufacturing; Surface contamination; Temperature control; Water pollution;
Conference_Titel :
Semiconductor Manufacturing, 2003 IEEE International Symposium on
Print_ISBN :
0-7803-7894-6
DOI :
10.1109/ISSM.2003.1243221
