Title :
High speed AMHS and its operation method for 300 mm QTAT-fab
Author :
Watanabe, Shigetaka ; Wakabayashi, Tetsushi ; Kobayashi, Yoshiyuki ; Okabe, Toshiya ; Koike, Atsushi
Author_Institution :
Trecenti Technol. Inc., Hitachinaka, Japan
fDate :
30 Sept.-2 Oct. 2003
Abstract :
By using all-single-wafer processing in the 300 mm QTAT production system, we have shortened cycle time to 1/2 or less compared with mixed-batch processing. We have also developed a high-speed AMHS for realizing a short cycle time. An intra-bay RGV developed for the 300 mm fab is a component of this system. This paper describes the new system concepts, including AMHS hardware improvement, operation methods, and technician skill enhancement. Trecenti Technologies realized a transfer time of 1/3 or less that of previous fabs.
Keywords :
automatic guided vehicles; electronics industry; factory automation; materials handling equipment; semiconductor device manufacture; semiconductor technology; 300 mm; cycle time; hardware improvement; quick tern around time fab; rail guided vehicle; wafer processing; Automatic control; Consumer electronics; Control systems; Hardware; Logic; Multimedia systems; Production; Rails; Semiconductor device manufacture; Vehicles;
Conference_Titel :
Semiconductor Manufacturing, 2003 IEEE International Symposium on
Print_ISBN :
0-7803-7894-6
DOI :
10.1109/ISSM.2003.1243223
