Breakthrough in prototyping lead time by use of a photomask control plan

To reduce prototype lead times Philips Semiconductors has introduced the Flying Dutchman (FD) concept in its 0.18 μm process technology. Based on industry-common methods, FD mainly discriminates itself by also removing virtually all in-line litho CD and overlay measurements from the process-flow, enabled by the use of high-quality photomasks that give predictable on-wafer results. A photomask control plan ensures that two or more of these photomasks can be obtained per day from our commercial mask vendor. As a result, FD reduces waferfab cycle-time to 0.35 days per maskstep.