DocumentCode
2264537
Title
Determination of the local electron density based on millimeter wave interferometry II: Experimental operations and comparisons
Author
Chen, Zhaoquan ; Liu, Minghai ; Hong, Lingli ; Zhou, Qiyan ; Hu, Xiwei
Author_Institution
Coll. of Electr. & Inf. Eng., Anhui Univ. of Sci. & Technol., Huainan, China
fYear
2010
fDate
Nov. 29 2010-Dec. 2 2010
Firstpage
618
Lastpage
621
Abstract
The determination method of the local electron density is shown based on millimeter wave interferometry and the electron density measuring is experimented on a cylindrical capacitively coupled plasmas (CCP) setup. Results show the excellent agreement between the radial density profiles in the central plane measured by interferometry with the proposed analysis method and by the Langmuir probe system.
Keywords
electron density; microwave measurement; plasma density; plasma sources; radiowave interferometry; Langmuir probe system; central plane; cylindrical capacitively coupled plasmas setup; local electron density; millimeter wave interferometry; radial density profiles;
fLanguage
English
Publisher
ieee
Conference_Titel
Antennas Propagation and EM Theory (ISAPE), 2010 9th International Symposium on
Conference_Location
Guangzhou
Print_ISBN
978-1-4244-6906-2
Type
conf
DOI
10.1109/ISAPE.2010.5696541
Filename
5696541
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