Batched and cascaded run rate validation in a multi-module toolset

As the run rate of a multi-module toolset can depend on many dynamic factors such as the product/layer mix, cascade level, and batch size, it is very difficult to predict the actual run rates that will be achieved in practice. Thus, validation of these is critical to accurate capacity planning. This paper discusses a robust and straightforward process, and presentation format, that delivers an unambiguous statement of the run rate performance for multi-module toolsets. At Intel Ireland, this process has significantly improved the accuracy of the tool capacity calculations and has reduced the validation time by over 90%.