DocumentCode
2265459
Title
Photothermal deflection for microscopy and detection of submicron-sized defects
Author
During, A. ; Fossati, C. ; Commandre, M.
Author_Institution
Inst. Fresnel, Marseille, France
fYear
2002
fDate
24-24 May 2002
Abstract
Summary form only given. We have developed a microscope based on the photothermal deflection of a transmitted beam The pump and probe beams are collinear and focused through the same optics, in order to increase lateral spatial resolution without reducing sensitivity. Performances of this microscope are studied in terms of lateral spatial resolution and sensitivity.
Keywords
crystal defects; image resolution; optical microscopy; optical pumping; photothermal effects; absorbing defects; focussing optics; lateral spatial resolution; optics; photothermal deflection; photothermal deflection microscopy; photothermal microscope; probe beams; pump beams; pump waist; sensitivity; submicron-sized defects detection; transmitted beam; Laser beams; Laser excitation; Microscopy; Missiles; Optical films; Optical pumping; Optical sensors; Optimized production technology; Probes; Spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location
Long Beach, CA, USA
Print_ISBN
1-55752-706-7
Type
conf
DOI
10.1109/CLEO.2002.1033636
Filename
1033636
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