DocumentCode
2265825
Title
Diffusion bay simulation and its impact on the overall FAB performance: a simplified example
Author
Collins, D.W. ; Flores-Godoy, J.-J. ; Tsakalis, K.S. ; Hoppensteadt, F.C.
Author_Institution
Arizona State Univ., Mesa, AZ, USA
fYear
2003
fDate
30 Sept.-2 Oct. 2003
Firstpage
315
Lastpage
318
Abstract
In this presentation the importance of simulation as a tool to understand the behavior of systems and their interactions is discussed. As an example, with the help of simulations of a diffusion bay it was possible to compute the probability of failure of the equipment for different controllers. This information is then used in a simplified FAB to study the performance that can be expected for different scheduling policies.
Keywords
failure analysis; integrated circuit manufacture; probability; production control; scheduling; controllers; diffusion bay simulation; failure equipment; overall FAB performance; probability; scheduling policies; Analytical models; Computational modeling; Discrete event simulation; Furnaces; Heating; Job shop scheduling; Production; Silicon; Temperature; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2003 IEEE International Symposium on
ISSN
1523-553X
Print_ISBN
0-7803-7894-6
Type
conf
DOI
10.1109/ISSM.2003.1243291
Filename
1243291
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