DocumentCode
2266066
Title
Tactical advanced process control
Author
Jensen, Carlos ; Do, D.
fYear
2003
fDate
30 Sept.-2 Oct. 2003
Firstpage
358
Lastpage
361
Abstract
To reduce implementation costs, maximize flexibility, and better manage intellectual property associated with Advanced Process Control (APC) systems, we present our experiences with tactical APC (TAPC) applications built upon established in-house tool automation, measurement collection, statistical process control (SPC), and process recipe management. TAPC includes process and software engineers, and a quality assurance statistician, focused on developing control algorithms capable of maintaining efficiency in process recipes.
Keywords
industrial property; integrated circuit manufacture; quality control; statistical process control; SPC; advanced process control; control algorithms; measurement collection; process recipe management; statistical process control; tool automation; Application software; Automatic control; Automation; Costs; Intellectual property; Maintenance engineering; Process control; Quality assurance; Software maintenance; Software quality;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2003 IEEE International Symposium on
ISSN
1523-553X
Print_ISBN
0-7803-7894-6
Type
conf
DOI
10.1109/ISSM.2003.1243301
Filename
1243301
Link To Document