Abstract :
To reduce implementation costs, maximize flexibility, and better manage intellectual property associated with Advanced Process Control (APC) systems, we present our experiences with tactical APC (TAPC) applications built upon established in-house tool automation, measurement collection, statistical process control (SPC), and process recipe management. TAPC includes process and software engineers, and a quality assurance statistician, focused on developing control algorithms capable of maintaining efficiency in process recipes.
Keywords :
industrial property; integrated circuit manufacture; quality control; statistical process control; SPC; advanced process control; control algorithms; measurement collection; process recipe management; statistical process control; tool automation; Application software; Automatic control; Automation; Costs; Intellectual property; Maintenance engineering; Process control; Quality assurance; Software maintenance; Software quality;
