Development of microbubble monitoring and removal technology in liquid material

Author

Imai, S.-i. ; Kitabata, M.

Author_Institution

Manuf. Technol. Center, Matsushita Electr. Ind. Co. Ltd., Toyama, Japan

fYear

2003

fDate

30 Sept.-2 Oct. 2003

Firstpage

374

Lastpage

377

Abstract

It is described that in the supply tube of TARC liquid material, microbubbles can be detected using a conventional liquid particle sensor by taking into account a delay time before coating wafer with TARC film. In this paper, it is shown that the number of microbubbles on a wafer is linearly related to the number of microbubbles passing through the supply tube. Moreover, we show that a novel filter module composed of hollow fibers made of a gas-permeable membrane with a degassing pump is extremely effective in removing the microbubbles in the TARC supply tube.

Keywords

antireflection coatings; bubbles; filters; integrated circuit manufacture; materials handling equipment; optical sensors; photoresists; process monitoring; production materials; coating wafer; conventional liquid particle sensor; fibers; filter module; gas-permeable membrane; liquid material; microbubble monitoring; microbubbles; removal technology; top anti reflective coating; Biomembranes; Coatings; Filters; Gas detectors; Inspection; Monitoring; Optical films; Optical scattering; Semiconductor films; Semiconductor materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2003 IEEE International Symposium on

ISSN

1523-553X

Print_ISBN

0-7803-7894-6

Type

conf

DOI

10.1109/ISSM.2003.1243306

Filename

1243306