DocumentCode
2266410
Title
Microdischarge devices on the 10 ~ 30 /spl mu/m scale: fabrication and applications
Author
Sung-Jin Park ; Chen, J. ; Chang Liu ; Eden, J.G.
Author_Institution
University of Illinois
fYear
2002
fDate
24-24 May 2002
Firstpage
252
Lastpage
252
Abstract
Summary form only given. We have fabricated several types of microdischarge devices and arrays, and from those, unique plasma operation conditions were observed. In particular, as cavity dimensions are decreased from several hundreds to tens of microns, glow discharges are produced at gas pressures up to and beyond one atmosphere. Also, specific power loadings of the plasma can exceed 100 kW-cm-, on a continuous basis.
Keywords
Cathodes; Electrodes; Micromechanical devices; Optical device fabrication; Optical devices; Optical polymers; Optical waveguides; Optimized production technology; Plasma devices; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location
Long Beach, CA, USA
Print_ISBN
1-55752-706-7
Type
conf
DOI
10.1109/CLEO.2002.1033911
Filename
1033911
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