Title :
Cost effective small via generation-the laser solution
Author :
Gu, Bo ; Morrison, J.M.
Author_Institution :
Lumonics Inc., Kanata, Ont., Canada
fDate :
31 Jan-2 Feb 1995
Abstract :
In today´s electronics packaging industry, the choice of the technologies of generating smaller vias remains undetermined. Laser drilling is one of the most promising among all small via generation technologies. However, historically laser processing has been viewed as an expensive and slow process. We recently reported a cost effective small via drilling process based on a modified TEA CO2 laser. The field test showed the process was reliable and cost effective. The new results from more in-depth experiments are presented in this paper along with the comparison among various laser drilling technologies
Keywords :
carbon compounds; gas lasers; integrated circuit manufacture; laser beam machining; laser materials processing; microassembling; multichip modules; packaging; CO2; electronics packaging; field test; laser drilling; modified TEA CO2 laser; reliable cost effective process; small via generation; Copper; Costs; Drilling; Electronics packaging; Etching; Gas lasers; Laser ablation; Laser beams; Laser modes; Surface emitting lasers;
Conference_Titel :
Multi-Chip Module Conference, 1995. MCMC-95, Proceedings., 1995 IEEE
Conference_Location :
Santa Cruz, CA
Print_ISBN :
0-8186-6970-5
DOI :
10.1109/MCMC.1995.512029