• DocumentCode
    2267492
  • Title

    Cost effective small via generation-the laser solution

  • Author

    Gu, Bo ; Morrison, J.M.

  • Author_Institution
    Lumonics Inc., Kanata, Ont., Canada
  • fYear
    1995
  • fDate
    31 Jan-2 Feb 1995
  • Firstpage
    212
  • Lastpage
    216
  • Abstract
    In today´s electronics packaging industry, the choice of the technologies of generating smaller vias remains undetermined. Laser drilling is one of the most promising among all small via generation technologies. However, historically laser processing has been viewed as an expensive and slow process. We recently reported a cost effective small via drilling process based on a modified TEA CO2 laser. The field test showed the process was reliable and cost effective. The new results from more in-depth experiments are presented in this paper along with the comparison among various laser drilling technologies
  • Keywords
    carbon compounds; gas lasers; integrated circuit manufacture; laser beam machining; laser materials processing; microassembling; multichip modules; packaging; CO2; electronics packaging; field test; laser drilling; modified TEA CO2 laser; reliable cost effective process; small via generation; Copper; Costs; Drilling; Electronics packaging; Etching; Gas lasers; Laser ablation; Laser beams; Laser modes; Surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Multi-Chip Module Conference, 1995. MCMC-95, Proceedings., 1995 IEEE
  • Conference_Location
    Santa Cruz, CA
  • Print_ISBN
    0-8186-6970-5
  • Type

    conf

  • DOI
    10.1109/MCMC.1995.512029
  • Filename
    512029