Lithium discharges in a microwave resonant cavity ion source

Summary form only given, as follows. Lithium-argon plasmas have been produced in a microwave resonant cavity ion source at the University of Michigan. Lithium has been introduced into the system in the solid forms of LiCl and Li/sub 2/CO/sub 3/, which is then heated by a background argon discharge allowing dissociation of the lithium. The dissociation is evidenced by the observation of strong Li I lines in the discharge using optical emission spectroscopy. Input microwave powers of 100-250 watts have been used and discharges have been established with background argon pressures of 5-20 mTorr. Double Langmuir probe studies have indicated ion densities 1-5/spl times/10/sup 10//cm/sup 3/ and electron temperatures of 3-3.5 eV. A comparison of discharges created with LiCl and Li/sub 2/CO/sub 3/ will be made. Behavior of the discharge with varying initial amounts of Li/sub 2/CO/sub 3/ and argon pressures will be shown. Discussion of its use as a lithium ion source for thin film deposition will be presented as well.