Design of a novel 5-bit distributed MEMS phase shifter

Based on analysis of coupling between two adjacent lines with common ground plane, a novel 5-bit distributed MEMS phase shifter using meander structure is presented. Making full use of common ground plane, the area is reduced to 5.36 mm*4.72 mm. Compared to 5-bit distributed phase shifter using conventional structure, the length of advanced phase shifter is decreased by 70%. The phase shifter is formed by two kinds of unit cells which are respectively linear unit cell and unit cell with right angle bend. The return loss of the linear unit cell which achieves phase shift of 11.25° is below -20dB and the worst insertion loss is -0.083dB at 10GHz. At the same time, the designed unit cell with right angle bend which obtains phase shift of 22.5° shows return loss of -17.11 dB, insertion loss of -0.27 dB and in the worst case at 10GHz.