Title :
A new saw device with tellurium sensing film for NO2 detection
Author :
Xuefeng Yan ; Dongmei Li ; Ming Liu ; Tianchun Ye
Author_Institution :
Key Lab of Nano-fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
Abstract :
A new surface acoustic wave device is demonstrated using tellurium (Te) sensing film on ST-X quartz substrate to detect NO2 dynamically at room temperature. The real-time frequency shift as a function of NO2 gas concentration is collected by Universal Counter. Devices with three different Te thicknesses of 60, 120 and 180 nm have been compared. It is found that the device with 120 nm Te film has the largest frequency shift, the device with 180 nm Te film follows and the device with 60 nm Te film shows the smallest frequency shift.
Keywords :
NO2; sensing film; surface acoustic wave; tellurium; thickness;
Conference_Titel :
Advanced Intelligence and Awarenss Internet (AIAI 2010), 2010 International Conference on
Conference_Location :
Beijing, China
DOI :
10.1049/cp.2010.0740
